Inventor
EGUCHI KOJI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “EGUCHI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
9 patentsUS6194907B1Feb 27, 2001
Prober and electric evaluation method of semiconductor device
MITSUBISHI ELECTRIC CORP110 citations95
US5466638ANov 14, 1995
Method of manufacturing a metal interconnect with high resistance to electromigration
MITSUBISHI ELECTRIC CORP21 citations92
US5373192ADec 13, 1994
Electromigration resistance metal interconnect
MITSUBISHI ELECTRIC CORP21 citations92
US5446301AAug 29, 1995
Semiconductor device including semiconductor layer having impurity region and method of manufacturing the same
MITSUBISHI ELECTRIC CORP6 citations74
US5381029AJan 10, 1995
Semiconductor device including semiconductor layer having impurity region and method of manufacturing the same
MITSUBISHI ELECTRIC CORP15 citations74
US5444186AAug 22, 1995
Multilayer conductive wire for semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP9 citations73
US5200807AApr 6, 1993
Wiring connection structure for a semiconductor integrated circuit device
MITSUBISHI ELECTRIC CORP17 citations73
US4849854AJul 18, 1989
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP11 citations73
US6595428B2Jul 22, 2003
Process control device and process control method using a medium with rewritable marking technique
MITSUBISHI ELECTRIC CORP4 citations61