Inventor

KEWLEY DAVID

US8 patents

⚠️ This page may combine multiple inventors who share the name “KEWLEY DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRON TECHNOLOGY INC

6 patents

US7488685B2Feb 10, 2009

Process for improving critical dimension uniformity of integrated circuit arrays

MICRON TECHNOLOGY INC69 citations95

US9553082B2Jan 24, 2017

Process for improving critical dimension uniformity of integrated circuit arrays

MICRON TECHNOLOGY INC5 citations82

US8889020B2Nov 18, 2014

Process for improving critical dimension uniformity of integrated circuit arrays

MICRON TECHNOLOGY INC8 citations82

US8003482B2Aug 23, 2011

Methods of processing semiconductor substrates in forming scribe line alignment marks

MICRON TECHNOLOGY INC5 citations72

US9176385B2Nov 3, 2015

Lithography methods, methods for forming patterning tools and patterning tools

MICRON TECHNOLOGY INC0 citations51

US8956976B2Feb 17, 2015

Methods of processing semiconductor substrates in forming scribe line alignment marks

MICRON TECHNOLOGY INC0 citations50

KEWLEY DAVID

1 patent

US8334211B2Dec 18, 2012

Process for improving critical dimension uniformity of integrated circuit arrays

KEWLEY DAVID30 citations87

ZHOU JIANMING

1 patent

US8609302B2Dec 17, 2013

Lithography methods, methods for forming patterning tools and patterning tools

ZHOU JIANMING2 citations62