Inventor
MATSUZAWA KENSUKE
JP16 patents
⚠️ This page may combine multiple inventors who share the name “MATSUZAWA KENSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
5 patentsUS8795948B2Aug 5, 2014
Resist composition, method of forming resist pattern and polymeric compound
TOKYO OHKA KOGYO CO LTD12 citations83
US7927780B2Apr 19, 2011
Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator
TOKYO OHKA KOGYO CO LTD9 citations83
US7488568B2Feb 10, 2009
Resist composition, method of forming resist pattern, compound and acid generator
TOKYO OHKA KOGYO CO LTD7 citations73
US8956801B2Feb 17, 2015
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US8367299B2Feb 5, 2013
Resist composition, method of forming resist pattern, compound and acid generator
TOKYO OHKA KOGYO CO LTD1 citations51
KAWAUE AKIYA
3 patentsUS8338076B2Dec 25, 2012
Resist composition, method of forming resist pattern, novel compound, and acid generator
KAWAUE AKIYA7 citations83
US8252505B2Aug 28, 2012
Compound and method of producing same, acid generator, resist composition, and method of forming resist pattern
KAWAUE AKIYA4 citations62
US8206890B2Jun 26, 2012
Resist composition, method of forming resist pattern, compound and acid generator
KAWAUE AKIYA2 citations61
HADA HIDEO
2 patentsUS9034556B2May 19, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
HADA HIDEO2 citations60
US9040220B2May 26, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
HADA HIDEO0 citations50