Inventor
O'NEILL ROBERT G
US6 patents
Patents
6 patentsUS9123651B2Sep 1, 2015
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP6 citations82
US9546432B2Jan 17, 2017
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP3 citations71
US9767996B2Sep 19, 2017
Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmas
LAM RES CORP3 citations69
US9337002B2May 10, 2016
Corrosion resistant aluminum coating on plasma chamber components
LAM RES CORP6 citations69
US9412670B2Aug 9, 2016
System, method and apparatus for RF power compensation in plasma etch chamber
LAM RES CORP2 citations57
US12567566B2Mar 3, 2026
Wide-coverage edge ring for enhanced shielding in substrate processing systems
LAM RES CORP0 citations44