Inventor
KERNS JOHN MICHAEL
US7 patents
⚠️ This page may combine multiple inventors who share the name “KERNS JOHN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS9123651B2Sep 1, 2015
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP6 citations82
US9873940B2Jan 23, 2018
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
LAM RES CORP16 citations81
US9546432B2Jan 17, 2017
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP3 citations71
US9337002B2May 10, 2016
Corrosion resistant aluminum coating on plasma chamber components
LAM RES CORP6 citations69
US12249490B2Mar 11, 2025
Single crystal metal oxide plasma chamber component
LAM RES CORP0 citations55
US12270748B2Apr 8, 2025
Method and apparatus for measuring particles
LAM RES CORP0 citations49