Inventor

GROOTJANS WILLEM JAN

NL3 patents

⚠️ This page may combine multiple inventors who share the name “GROOTJANS WILLEM JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9518936B2Dec 13, 2016

Method and apparatus for determining lithographic quality of a structure

ASML NETHERLANDS BV2 citations58

US9760018B2Sep 12, 2017

Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure

ASML NETHERLANDS BV0 citations39

DEN BOEF ARIE JEFFREY

1 patent

US8868387B2Oct 21, 2014

Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus

DEN BOEF ARIE JEFFREY28 citations89