Inventor
BIWA SATOSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “BIWA SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS10679845B2Jun 9, 2020
Substrate processing apparatus having cooling member
TOKYO ELECTRON LTD5 citations71
US10619922B2Apr 14, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations71
US10593571B2Mar 17, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations68
US10276425B2Apr 30, 2019
Substrate processing system
TOKYO ELECTRON LTD1 citations61
US12456632B2Oct 28, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations59
US11295965B2Apr 5, 2022
Cleaning apparatus and cleaning method of substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US11557492B2Jan 17, 2023
Substrate processing apparatus and control method thereof
TOKYO ELECTRON LTD0 citations50
US10381246B2Aug 13, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12057327B2Aug 6, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations48