Inventor
RAO PREETHAM
IN11 patents
Patents
11 patentsUS11171023B2Nov 9, 2021
Diode laser for wafer heating for EPI processes
APPLIED MATERIALS INC4 citations71
US10000847B2Jun 19, 2018
Graphite susceptor
APPLIED MATERIALS INC2 citations71
US11021794B2Jun 1, 2021
Graphite susceptor
APPLIED MATERIALS INC0 citations60
US11807931B2Nov 7, 2023
Chamber injector
APPLIED MATERIALS INC0 citations59
US11492699B2Nov 8, 2022
Substrate temperature non-uniformity reduction over target life using spacing compensation
APPLIED MATERIALS INC0 citations59
US11492704B2Nov 8, 2022
Chamber injector
APPLIED MATERIALS INC0 citations59
US11978646B2May 7, 2024
Thermal chamber with improved thermal uniformity
APPLIED MATERIALS INC0 citations57
US10677830B2Jun 9, 2020
Methods and apparatus for detecting microwave fields in a cavity
APPLIED MATERIALS INC0 citations51
US10600664B2Mar 24, 2020
Fluorescence based thermometry for packaging applications
APPLIED MATERIALS INC0 citations50
US12518069B2Jan 6, 2026
Comprehensive modeling platform for manufacturing equipment
APPLIED MATERIALS INC0 citations45
US10455642B2Oct 22, 2019
Rapid thermal processing chamber with linear control lamps
APPLIED MATERIALS INC0 citations40