Inventor
WOO JONG HYEON
KR4 patents
Patents
4 patentsUS11361962B2Jun 14, 2022
Method and apparatus for processing substrate
SEMES CO LTD3 citations68
US12234555B2Feb 25, 2025
Substrate treating apparatus and filler member provided therein
SEMES CO LTD0 citations58
US11511321B2Nov 29, 2022
Substrate processing method and substrate processing apparatus
SEMES CO LTD0 citations58
US12061097B2Aug 13, 2024
Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium
SEMES CO LTD0 citations56