Inventor
KAJIWARA MASAYUKI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “KAJIWARA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
18 patentsUS7045444B2May 16, 2006
Method of manufacturing semiconductor device that includes selectively adding a noble gas element
SEMICONDUCTOR ENERGY LAB47 citations96
US6913956B2Jul 5, 2005
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB62 citations96
US6858480B2Feb 22, 2005
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB37 citations96
US7501671B2Mar 10, 2009
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB13 citations93
US7316947B2Jan 8, 2008
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB23 citations93
US7306982B2Dec 11, 2007
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB19 citations93
US7141822B2Nov 28, 2006
Semiconductor device and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB24 citations93
US7033871B2Apr 25, 2006
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB14 citations93
US6808968B2Oct 26, 2004
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB37 citations93
US7115453B2Oct 3, 2006
Semiconductor device and manufacturing method of the same
SEMICONDUCTOR ENERGY LAB42 citations92
US7605029B2Oct 20, 2009
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB7 citations74
US7198992B2Apr 3, 2007
Method of manufacturing a semiconductor device comprising doping steps using gate electrodes and resists as masks
SEMICONDUCTOR ENERGY LAB7 citations74
US9246009B2Jan 26, 2016
Semiconductor device and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB3 citations73
US7151016B2Dec 19, 2006
Method of manufacturing a semiconductor device that includes a hydrogen concentration depth profile
SEMICONDUCTOR ENERGY LAB8 citations73
US7821005B2Oct 26, 2010
Method of manufacturing semiconductor device and semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations63
US7709894B2May 4, 2010
Semiconductor device including a transistor with a gate electrode having a taper portion
SEMICONDUCTOR ENERGY LAB4 citations62
US7534670B2May 19, 2009
Semiconductor device and manufacturing method of the same
SEMICONDUCTOR ENERGY LAB0 citations52
US7538011B2May 26, 2009
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations50
TOKYO ELECTRON LTD
3 patentsUS10807027B2Oct 20, 2020
Treatment solution supply apparatus and substrate treatment system
TOKYO ELECTRON LTD1 citations61
US10023477B2Jul 17, 2018
Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US12094737B2Sep 17, 2024
Substrate processing apparatus, control method, and computer-readable storage medium
TOKYO ELECTRON LTD0 citations43