Inventor
ISHIMARU DAISUKE
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMARU DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS9846363B2Dec 19, 2017
Processing liquid supplying apparatus and method of supplying processing liquid
TOKYO ELECTRON LTD7 citations83
US11333142B2May 17, 2022
Tube body and pumping device
TOKYO ELECTRON LTD1 citations60
US10518199B2Dec 31, 2019
Treatment solution supply apparatus
TOKYO ELECTRON LTD1 citations60
US10268116B2Apr 23, 2019
Processing liquid supplying apparatus and method of supplying processing liquid
TOKYO ELECTRON LTD0 citations51
US12094737B2Sep 17, 2024
Substrate processing apparatus, control method, and computer-readable storage medium
TOKYO ELECTRON LTD0 citations43
US9778571B2Oct 3, 2017
Processing liquid supplying apparatus, processing liquid supplying method and storage medium
TOKYO ELECTRON LTD0 citations39
US10655619B2May 19, 2020
Pump, pump device, and liquid supply system
TOKYO ELECTRON LTD0 citations36