Inventor
AKAMATSU AKIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “AKAMATSU AKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS7209215B2Apr 24, 2007
Exposure apparatus and method
CANON KK9 citations70
US11531276B2Dec 20, 2022
Exposure apparatus, exposure method, and article manufacturing method
CANON KK3 citations69
US11181825B2Nov 23, 2021
Exposure apparatus and method of manufacturing article
CANON KK2 citations66
US9534888B2Jan 3, 2017
Detection apparatus, measurement apparatus, exposure apparatus, method of manufacturing article, and measurement method
CANON KK0 citations38