Inventor
KIUCHI TAKASHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KIUCHI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
6 patentsUS5719402AFeb 17, 1998
Method of and system for charged particle beam exposure
FUJITSU LTD32 citations92
US5546319AAug 13, 1996
Method of and system for charged particle beam exposure
FUJITSU LTD21 citations92
US5965895AOct 12, 1999
Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure
FUJITSU LTD13 citations82
US5721432AFeb 24, 1998
Method of and system for charged particle beam exposure
FUJITSU LTD16 citations82
US4948983AAug 14, 1990
Alignment of mask and semiconductor wafer using linear fresnel zone plate
FUJITSU LTD19 citations78
US4999487AMar 12, 1991
Alignment of mask and semiconductor wafer using linear Fresnel zone plate
FUJITSU LTD6 citations73