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Inventor
SAKAMOTO TAKEAKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “SAKAMOTO TAKEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAKAMOTO TAKEAKI
1 patent
US10076889B2
Sep 18, 2018
Wrapped three-dimensional shaped article and process for its production
SAKAMOTO TAKEAKI
2 citations
60
TOKYO ELECTRON LTD
1 patent
US12094737B2
Sep 17, 2024
Substrate processing apparatus, control method, and computer-readable storage medium
TOKYO ELECTRON LTD
0 citations
43