Inventor
HYODO YASUYOSHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “HYODO YASUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
9 patentsUS7064088B2Jun 20, 2006
Method for forming low-k hard film
ASM JAPAN62 citations96
US6881683B2Apr 19, 2005
Insulation film on semiconductor substrate and method for forming same
ASM JAPAN51 citations92
US6830007B2Dec 14, 2004
Apparatus and method for forming low dielectric constant film
ASM JAPAN26 citations92
US6784123B2Aug 31, 2004
Insulation film on semiconductor substrate and method for forming same
ASM JAPAN28 citations92
US6537928B1Mar 25, 2003
Apparatus and method for forming low dielectric constant film
ASM JAPAN33 citations92
US6852650B2Feb 8, 2005
Insulation film on semiconductor substrate and method for forming same
ASM JAPAN19 citations84
US7655577B2Feb 2, 2010
Method of forming silicon-containing insulation film having low dielectric constant and low film stress
ASM JAPAN2 citations63
US7148154B2Dec 12, 2006
Method of forming silicon-containing insulation film having low dielectric constant and low film stress
ASM JAPAN3 citations63
US7585789B2Sep 8, 2009
Method for forming porous insulation film
ASM JAPAN6 citations62
TOSHIBA KK
4 patentsUS9466611B2Oct 11, 2016
Integrated circuit device and method for manufacturing the same
TOSHIBA KK6 citations73
US7906434B2Mar 15, 2011
Manufacturing method of semiconductor devices
TOSHIBA KK3 citations61
US11744484B2Sep 5, 2023
Behavior estimating method, behavior estimating system, service providing method, signal detecting method, signal detecting unit, and signal processing system
TOSHIBA KK0 citations47
US11392879B2Jul 19, 2022
Operation estimating method and operation estimating system
TOSHIBA KK0 citations47