Inventor

HAIDNER HELMUT

DE18 patents

⚠️ This page may combine multiple inventors who share the name “HAIDNER HELMUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAIDNER HELMUT

ZEISS CARL SMT AG

Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry

Apparatus and method for measuring the wavefront of an optical system

Apparatus for wavefront detection

Interferometric measuring device and projection exposure installation comprising such measuring device

Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser

Device and method for the optical measurement of an optical system by using an immersion fluid

Device and method for the determination of imaging errors and microlithography projection exposure system

Method of manufacturing a miniaturized device

Diffuser, wavefront source, wavefront sensor and projection exposure apparatus

ZEISS CARL SMT GMBH

Apparatus for determining an optical property of an optical imaging system

Measuring system for measuring an imaging quality of an EUV lens

Projection exposure apparatus and method for measuring an imaging aberration

Device and method for the optical measurement of an optical system by using an immersion fluid

Measuring system

Measurement apparatus for measuring a wavefront aberration of an imaging optical system

ZEISS CARL SMS GMBH

Device and method for the interferometric measurement of phase masks

WEGMANN ULRICH

Device and method for the optical measurement of an optical system by using an immersion fluid

EMER WOLFGANG

Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods