Inventor
EMER WOLFGANG
DE20 patents
⚠️ This page may combine multiple inventors who share the name “EMER WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
10 patentsUS7760366B2Jul 20, 2010
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT AG34 citations94
US7417745B2Aug 26, 2008
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry
ZEISS CARL SMT AG21 citations92
US7796274B2Sep 14, 2010
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT AG21 citations89
US7436521B2Oct 14, 2008
Optical measuring apparatus and operating method for imaging error correction in an optical imaging system
ZEISS CARL SMT AG9 citations83
US7268890B2Sep 11, 2007
Device and method for wavefront measurement of an optical imaging system, and a microlithography projection exposure machine
ZEISS CARL SMT AG12 citations83
US7019846B2Mar 28, 2006
Method for determining wavefront aberrations
ZEISS CARL SMT AG8 citations73
US7372545B2May 13, 2008
Method for adjusting a projection objective
ZEISS CARL SMT AG6 citations62
US7209241B2Apr 24, 2007
Method for determining wavefront aberrations
ZEISS CARL SMT AG2 citations62
US7400388B2Jul 15, 2008
Method for determining distortion and/or image surface
ZEISS CARL SMT AG3 citations59
US7230220B2Jun 12, 2007
Method of determining optical properties and projection exposure system comprising a wavefront detection system
ZEISS CARL SMT AG6 citations58
ZEISS CARL SMT GMBH
8 patentsUS9715177B2Jul 25, 2017
Method for adjusting a projection objective
ZEISS CARL SMT GMBH1 citations62
US7965377B2Jun 21, 2011
Method for adjusting a projection objective
ZEISS CARL SMT GMBH2 citations62
US10018918B2Jul 10, 2018
Method for adjusting a projection objective
ZEISS CARL SMT GMBH0 citations51
US9915871B2Mar 13, 2018
Method for measuring an angularly resolved intensity distribution and projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US9081294B2Jul 14, 2015
Method for measuring an angularly resolved intensity distribution and projection exposure apparatus
ZEISS CARL SMT GMBH1 citations51
US9429495B2Aug 30, 2016
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT GMBH0 citations50
US8823948B2Sep 2, 2014
System for measuring the image quality of an optical imaging system
ZEISS CARL SMT GMBH0 citations50
US9753375B2Sep 5, 2017
Illumination optical unit for projection lithography
ZEISS CARL SMT GMBH0 citations40