Inventor
GOEPPERT MARKUS
DE9 patents
⚠️ This page may combine multiple inventors who share the name “GOEPPERT MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS10006807B2Jun 26, 2018
Apparatus for determining an optical property of an optical imaging system
ZEISS CARL SMT GMBH3 citations72
US8908192B2Dec 9, 2014
Method and apparatus for qualifying optics of a projection exposure tool for microlithography
ZEISS CARL SMT GMBH3 citations60
US8836929B2Sep 16, 2014
Device and method for the optical measurement of an optical system by using an immersion fluid
ZEISS CARL SMT GMBH0 citations51
US9482968B2Nov 1, 2016
Measuring system
ZEISS CARL SMT GMBH0 citations50
ZEISS CARL SMT AG
3 patentsUS7417745B2Aug 26, 2008
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry
ZEISS CARL SMT AG21 citations92
US7336371B1Feb 26, 2008
Apparatus and method for measuring the wavefront of an optical system
ZEISS CARL SMT AG49 citations92
US7760345B2Jul 20, 2010
Method and apparatus for determining at least one optical property of an imaging optical system
ZEISS CARL SMT AG1 citations45