Inventor
NIU DONG
US14 patents
⚠️ This page may combine multiple inventors who share the name “NIU DONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
11 patentsUS7094713B1Aug 22, 2006
Methods for improving the cracking resistance of low-k dielectric materials
NOVELLUS SYSTEMS INC74 citations97
US7390537B1Jun 24, 2008
Methods for producing low-k CDO films with low residual stress
NOVELLUS SYSTEMS INC51 citations92
US7381662B1Jun 3, 2008
Methods for improving the cracking resistance of low-k dielectric materials
NOVELLUS SYSTEMS INC32 citations92
US7326444B1Feb 5, 2008
Methods for improving integration performance of low stress CDO films
NOVELLUS SYSTEMS INC30 citations89
US8895415B1Nov 25, 2014
Tensile stressed doped amorphous silicon
NOVELLUS SYSTEMS INC14 citations83
US7781351B1Aug 24, 2010
Methods for producing low-k carbon doped oxide films with low residual stress
NOVELLUS SYSTEMS INC14 citations83
US9028924B2May 12, 2015
In-situ deposition of film stacks
NOVELLUS SYSTEMS INC7 citations82
US10214816B2Feb 26, 2019
PECVD apparatus for in-situ deposition of film stacks
NOVELLUS SYSTEMS INC6 citations81
US11746420B2Sep 5, 2023
PECVD apparatus for in-situ deposition of film stacks
NOVELLUS SYSTEMS INC1 citations72
US9165788B2Oct 20, 2015
Post-deposition soft annealing
NOVELLUS SYSTEMS INC4 citations69
US12385138B2Aug 12, 2025
Plasma-enhanced deposition of film stacks
NOVELLUS SYSTEMS INC0 citations60