Inventor
BANDYOPADHYAY ANANDA K
US5 patents
⚠️ This page may combine multiple inventors who share the name “BANDYOPADHYAY ANANDA K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS7253125B1Aug 7, 2007
Method to improve mechanical strength of low-k dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC82 citations97
US7611757B1Nov 3, 2009
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC39 citations95
US8043667B1Oct 25, 2011
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC18 citations92
US7781351B1Aug 24, 2010
Methods for producing low-k carbon doped oxide films with low residual stress
NOVELLUS SYSTEMS INC14 citations83