Inventor

ZHOU SHIFANG

US7 patents

⚠️ This page may combine multiple inventors who share the name “ZHOU SHIFANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HONEYWELL INT INC

3 patents

US7690254B2Apr 6, 2010

Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate

HONEYWELL INT INC18 citations79

US7830003B2Nov 9, 2010

Mechanical isolation for MEMS devices

HONEYWELL INT INC2 citations61

US7487678B2Feb 10, 2009

Z offset MEMS devices and methods

HONEYWELL INT INC2 citations60

FOSTER MICHAEL

2 patents

US8418555B2Apr 16, 2013

Bidirectional, out-of-plane, comb drive accelerometer

FOSTER MICHAEL1 citations50

US8404568B2Mar 26, 2013

Systems and methods for fabricating an out-of-plane MEMS structure

FOSTER MICHAEL0 citations50

NUVOTORNICS LLC

1 patent

US7649432B2Jan 19, 2010

Three-dimensional microstructures having an embedded and mechanically locked support member and method of formation thereof

NUVOTORNICS LLC55 citations92

ESKRIDGE MARK

1 patent

US9187313B2Nov 17, 2015

Anodically bonded strain isolator

ESKRIDGE MARK7 citations80