Inventor
SHOJI FUMITAKA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SHOJI FUMITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS9018093B2Apr 28, 2015
Method for forming layer constituted by repeated stacked layers
ASM IP HOLDING BV519 citations97
US9365924B2Jun 14, 2016
Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power
ASM IP HOLDING BV463 citations96
US12442082B2Oct 14, 2025
Reactor system comprising a tuning circuit
ASM IP HOLDING BV0 citations50
US10734219B2Aug 4, 2020
Plasma film forming method
ASM IP HOLDING BV0 citations49