Inventor
JANSEN BAUKE
NL18 patents
⚠️ This page may combine multiple inventors who share the name “JANSEN BAUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS9405205B2Aug 2, 2016
Lithographic apparatus and in-line cleaning apparatus
ASML NETHERLANDS BV16 citations91
US9785061B2Oct 10, 2017
Lithographic apparatus and in-line cleaning apparatus
ASML NETHERLANDS BV4 citations83
US7900641B2Mar 8, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV12 citations82
US7866330B2Jan 11, 2011
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US7841352B2Nov 30, 2010
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US8011377B2Sep 6, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV1 citations50
US7446849B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
DE GRAAF ROELOF FREDERIK
2 patentsBRUIJSTENS JEROEN PETER JOHANNES
2 patentsUS8730447B2May 20, 2014
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES3 citations59
US9176371B2Nov 3, 2015
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES2 citations58
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS
2 patentsUS9013672B2Apr 21, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations48
US8947629B2Feb 3, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations38