Inventor · disambiguated record
Je-Hun Woo
Also filed as: WOO JE-HUN
4 granted patents·4 pending applications·59 citations·filing 2015–2021
71Inventor score
Top patents by PatentIndex Score
8 records- 0190US9490107B2Plasma apparatus and method of fabricating semiconductor device using the sameKIM MOOJIN·Filed 2015·Granted Nov 8, 2016·55 cites·22 claims
- 0276US10971333B2Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 6, 2021·2 cites·17 claims
- 0370US9691618B2Methods of fabricating semiconductor devices including performing an atomic layer etching processSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 27, 2017·2 cites·13 claims
- 0459US12327709B2Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 10, 2025·0 cites·20 claims
- 0536US2018114700A1Method of atomic layer etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
- 0635US2017330734A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
- 0732US2017186586A1Plasma system, plasma processing method, and plasma etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
- 0830US2018366304A1Plasma processing apparatus and method for fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →