Inventor
NOLLER BASTIAN MARTEN
DE8 patents
⚠️ This page may combine multiple inventors who share the name “NOLLER BASTIAN MARTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BASF SE
4 patentsUS9777192B2Oct 3, 2017
Chemical mechanical polishing (CMP) composition comprising a protein
BASF SE3 citations71
US10214663B2Feb 26, 2019
Chemical-mechanical polishing composition comprising organic/inorganic composite particles
BASF SE0 citations49
US9416298B2Aug 16, 2016
Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing (CMP) of III-V material in the presence of a CMP composition comprising a specific non-ionic surfactant
BASF SE0 citations46
US10227506B2Mar 12, 2019
Chemical mechanical polishing (CMP) composition for high effective polishing of substrates comprising germanium
BASF SE0 citations34
NOLLER BASTIAN MARTEN
2 patentsUS9443739B2Sep 13, 2016
Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of elemental germanium and/or Si1-xGex material in the presence of a CMP composition comprising a specific organic compound
NOLLER BASTIAN MARTEN2 citations49
US10407594B2Sep 10, 2019
Chemical mechanical polishing (CMP) composition comprising a polymeric polyamine
NOLLER BASTIAN MARTEN0 citations33