Inventor
SOKOLOV SERGEI
NL9 patents
⚠️ This page may combine multiple inventors who share the name “SOKOLOV SERGEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS10831107B2Nov 10, 2020
Method for of measuring a parameter relating to a structure formed using a lithographic process
ASML NETHERLANDS BV3 citations70
US11181828B2Nov 23, 2021
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method
ASML NETHERLANDS BV2 citations67
US11474435B2Oct 18, 2022
Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter
ASML NETHERLANDS BV0 citations61
US12287591B2Apr 29, 2025
Lithographic apparatus, metrology systems, and methods thereof
ASML NETHERLANDS BV0 citations59
US11762305B2Sep 19, 2023
Alignment method
ASML NETHERLANDS BV0 citations59
US11150563B2Oct 19, 2021
Method of measuring a parameter of a patterning process, metrology apparatus, target
ASML NETHERLANDS BV1 citations57
US11022899B2Jun 1, 2021
Method of measuring a focus parameter relating to a structure formed using a lithographic process
ASML NETHERLANDS BV0 citations56
US10788757B2Sep 29, 2020
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations45