Inventor
FUJITA SENA
JP5 patents
Patents
5 patentsUS11260433B2Mar 1, 2022
Cleaning method of substrate processing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD2 citations68
US12252786B2Mar 18, 2025
Cleaning method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11915914B2Feb 27, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations59
US11410847B2Aug 9, 2022
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations59
US12545994B2Feb 10, 2026
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations57