Inventor
KUMAGAI KEITA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KUMAGAI KEITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11410847B2Aug 9, 2022
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations59
US11114297B2Sep 7, 2021
Method for forming semiconductor film and film forming device
TOKYO ELECTRON LTD0 citations57
US12112943B2Oct 8, 2024
Method for forming film and processing apparatus
TOKYO ELECTRON LTD0 citations53
US10256128B2Apr 9, 2019
Cooling mechanism and processing system
TOKYO ELECTRON LTD0 citations31