Inventor
BORGLUM WAYNE K
US3 patents
Patents
3 patentsUS5260668ANov 9, 1993
Semiconductor surface resistivity probe with semiconductor temperature control
PROMETRIX CORP46 citations90
US4907931AMar 13, 1990
Apparatus for handling semiconductor wafers
PROMETRIX CORP43 citations88
US4776695AOct 11, 1988
High accuracy film thickness measurement system
PROMETRIX CORP41 citations86