Inventor
TANAKA IKKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA IKKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS12580154B2Mar 17, 2026
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations58
US11676800B2Jun 13, 2023
Substrate processing apparatus and control method of substrate processing apparatus
TOKYO ELECTRON LTD0 citations54
US12354841B2Jul 8, 2025
Substrate processing device, substrate processing system, control method for substrate processing device, and control method for substrate processing system
TOKYO ELECTRON LTD0 citations47