Inventor
HONG HSI-HSIN
TW3 patents
Patents
3 patentsUS5637186AJun 10, 1997
Method and monitor testsite pattern for measuring critical dimension openings
UNITED MICROELECTRONICS CORP76 citations93
US6153360ANov 28, 2000
Method of removing photo-resist
UNITED MICROELECTRONICS CORP5 citations70
US6283134B1Sep 4, 2001
Apparatus for removing photo-resist
UNITED MICROELECTRONICS CORP3 citations59