P

Inventor

MISHIMA SHIRO

JP12 patents
⚠️ This page may combine multiple inventors who share the name “MISHIMA SHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

5 patents
US5695601ADec 9, 1997

Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method

TOSHIBA KK60 citations96
US6997782B2Feb 14, 2006

Polishing apparatus and a method of polishing and cleaning and drying a wafer

TOSHIBA KK16 citations92
US5395645AMar 7, 1995

Method for forming a silicon oxide film on a silicon waffer

TOSHIBA KK9 citations73
US7198552B2Apr 3, 2007

Polishing apparatus

TOSHIBA KK2 citations62
US5489336AFeb 6, 1996

Apparatus for forming a silicon oxide film on a silicon wafer

TOSHIBA KK3 citations62

EBARA CORP

4 patents
US5679059AOct 21, 1997

Polishing aparatus and method

EBARA CORP110 citations98
US5679063AOct 21, 1997

Polishing apparatus

EBARA CORP81 citations96
US6500051B1Dec 31, 2002

Polishing apparatus and method

EBARA CORP25 citations92
US5846335ADec 8, 1998

Method for cleaning workpiece

EBARA CORP40 citations91

YAMATO KOSAN KK

2 patents
US4876856AOct 31, 1989

Heat exchanging system

YAMATO KOSAN KK40 citations86
US4920750AMay 1, 1990

Heat exchanging system for power generation

YAMATO KOSAN KK20 citations76

TOMIZAWA HIDEYUKI

1 patent
US8614510B2Dec 24, 2013

Semiconductor device including a metal wiring with a metal cap

TOMIZAWA HIDEYUKI0 citations34