Inventor
VENKATKRISHNAN SUBRAMANIAN
US5 patents
Patents
5 patentsUS5769696AJun 23, 1998
Chemical-mechanical polishing of thin materials using non-baked carrier film
ADVANCED MICRO DEVICES INC27 citations91
US5766058AJun 16, 1998
Chemical-mechanical polishing using curved carriers
ADVANCED MICRO DEVICES INC21 citations91
US5780204AJul 14, 1998
Backside wafer polishing for improved photolithography
ADVANCED MICRO DEVICES INC19 citations89
US6403385B1Jun 11, 2002
Method of inspecting a semiconductor wafer for defects
ADVANCED MICRO DEVICES INC18 citations76
US6153933ANov 28, 2000
Elimination of residual materials in a multiple-layer interconnect structure
ADVANCED MICRO DEVICES INC13 citations71