Inventor
CHEN JAMES JIN-LONG
US3 patents
Patents
3 patentsUS6206971B1Mar 27, 2001
Integrated temperature controlled exhaust and cold trap assembly
APPLIED MATERIALS INC90 citations96
US6517592B2Feb 11, 2003
Cold trap assembly
APPLIED MATERIALS INC21 citations91
US6110322AAug 29, 2000
Prevention of ground fault interrupts in a semiconductor processing system
APPLIED MATERIALS INC65 citations89