Inventor
RELLEEN KEITH
GB5 patents
Patents
5 patentsUS6903349B2Jun 7, 2005
Ion implanter and a method of implanting ions
APPLIED MATERIALS INC22 citations91
US6555825B1Apr 29, 2003
Ion implanter
APPLIED MATERIALS INC29 citations88
US7777203B2Aug 17, 2010
Substrate holding apparatus
APPLIED MATERIALS INC7 citations69
US7785060B2Aug 31, 2010
Multi-directional mechanical scanning in an ion implanter
APPLIED MATERIALS INC5 citations58
USD445779SJul 31, 2001
Cassette loading device
APPLIED MATERIALS INC0 citations48