Inventor
YEN CHING LANG
TW3 patents
Patents
3 patentsUS6261921B1Jul 17, 2001
Method of forming shallow trench isolation structure
TAIWAN SEMICONDUCTOR MFG113 citations95
US7339253B2Mar 4, 2008
Retrograde trench isolation structures
TAIWAN SEMICONDUCTOR MFG12 citations81
US6926590B1Aug 9, 2005
Method of improving device performance
TAIWAN SEMICONDUCTOR MFG8 citations71