Inventor
PERRY ANDREW J
US3 patents
Patents
3 patentsUS7019844B2Mar 28, 2006
Method for in-situ monitoring of patterned substrate processing using reflectometry.
LAM RES CORP21 citations89
US6168690B1Jan 2, 2001
Methods and apparatus for physical vapor deposition
LAM RES CORP21 citations88
US7399711B2Jul 15, 2008
Method for controlling a recess etch process
LAM RES CORP13 citations81