Inventor

KIMBALL CHRIS

US2 patents

⚠️ This page may combine multiple inventors who share the name “KIMBALL CHRIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US7829468B2Nov 9, 2010

Method and apparatus to detect fault conditions of plasma processing reactor

LAM RES CORP22 citations90

KIMBALL CHRIS

1 patent

US8906164B2Dec 9, 2014

Methods for stabilizing contact surfaces of electrostatic chucks

KIMBALL CHRIS0 citations29