Inventor
BARTRAY PETRUS RUTGERUS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “BARTRAY PETRUS RUTGERUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7253880B2Aug 7, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7408615B2Aug 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7345736B2Mar 18, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations61
US7522258B2Apr 21, 2009
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
ASML NETHERLANDS BV3 citations60
US7471373B2Dec 30, 2008
Lithographic apparatus with patterning device position determination
ASML NETHERLANDS BV3 citations60
US7130019B2Oct 31, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7126664B2Oct 24, 2006
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV4 citations60
US7349067B2Mar 25, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51