Inventor

WIJCKMANS MAURICE WILLEM JOZEF ETIENNE

NL5 patents

⚠️ This page may combine multiple inventors who share the name “WIJCKMANS MAURICE WILLEM JOZEF ETIENNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LOOPSTRA ERIK ROELOF

2 patents

US8300208B2Oct 30, 2012

Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus

LOOPSTRA ERIK ROELOF8 citations82

US8289498B2Oct 16, 2012

Lithographic apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF1 citations45

ASML NETHERLANDS BV

2 patents

US11029612B2Jun 8, 2021

Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness

ASML NETHERLANDS BV5 citations66

US10816910B2Oct 27, 2020

Vibration isolator, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations47

BUTLER HANS

1 patent

US8144310B2Mar 27, 2012

Positioning system, lithographic apparatus and device manufacturing method

BUTLER HANS5 citations71