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Inventor
GRAITZER EREZ
IL
5 patents
⚠️ This page may combine multiple inventors who share the name “GRAITZER EREZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEN-ZVI GUY
2 patents
US8421026B2
Apr 16, 2013
Method and apparatus for mapping of line-width size distributions on photomasks
BEN-ZVI GUY
6 citations
67
US8592770B2
Nov 26, 2013
Method and apparatus for DUV transmission mapping
BEN-ZVI GUY
0 citations
43
PFORR RAINER
1 patent
US8871409B2
Oct 28, 2014
Lithographic targets for uniformity control
PFORR RAINER
3 citations
59
DMITRIEV VLADIMIR
1 patent
US9207530B2
Dec 8, 2015
Analyses of measurement data
DMITRIEV VLADIMIR
2 citations
57
ZEISS CARL SMT GMBH
1 patent
US11249294B2
Feb 15, 2022
Optical system and method for correcting mask defects using the system
ZEISS CARL SMT GMBH
0 citations
48