Inventor

SCHAFFER DIRK

DE19 patents

⚠️ This page may combine multiple inventors who share the name “SCHAFFER DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHAFFER DIRK

ZEISS CARL SMT GMBH

Optical arrangement of a microlithographic projection exposure apparatus

Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same

Optical element module with minimized parasitic loads

Optical system and lithography apparatus

Optical element for the beam guidance of imaging light in projection lithography

Optical element module with minimized parasitic loads

Mirror arrangement for a lithography apparatus and method for producing the same

Optical element unit for exposure processes

Lithography apparatus and method for producing a mirror arrangement

Mirror module, in particular for a microlithographic projection exposure appararatus

Mounting arrangement for an optical imaging arrangement

SCHAFFER DIRK

Optical element unit and method of supporting an optical element

Optical arrangement in a microlithographic projection exposure apparatus

ZEISS CARL SMT AG

Device for the low-deformation replaceable mounting of an optical element

Low-deformation support device of an optical element

LIPPERT JOHANNES

Optical element for UV or EUV lithography with coatings having optimized stress and thickness

SORG FRANZ

Device for the low-deformation replaceable mounting of an optical element

SCHWERTNER TILMAN

Optical element unit for exposure processes having sealing element

CHUNG HIN YIU ANTHONY

Method for bonding bodies and composite body