Inventor

CHUNG HIN-YIU ANTHONY

DE10 patents

⚠️ This page may combine multiple inventors who share the name “CHUNG HIN-YIU ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

4 patents

US10141174B2Nov 27, 2018

Method for examining a gas by mass spectrometry and mass spectrometer

ZEISS CARL SMT GMBH8 citations78

US10304672B2May 28, 2019

Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture

ZEISS CARL SMT GMBH5 citations69

US10236169B2Mar 19, 2019

Ionization device with mass spectrometer therewith

ZEISS CARL SMT GMBH3 citations67

US9459538B2Oct 4, 2016

Lithography apparatus and method for producing a mirror arrangement

ZEISS CARL SMT GMBH0 citations50

LEYBOLD GMBH

2 patents

US10903060B2Jan 26, 2021

Method for mass spectrometric examination of gas mixtures and mass spectrometer therefor

LEYBOLD GMBH2 citations69

US11875985B2Jan 16, 2024

Mass spectrometer comprising an ionization device

LEYBOLD GMBH0 citations57

CHUNG HIN YIU ANTHONY

2 patents

US9176399B2Nov 3, 2015

Component of an EUV or UV lithography apparatus and method for producing it

CHUNG HIN YIU ANTHONY2 citations56

US8927090B2Jan 6, 2015

Method for bonding bodies and composite body

CHUNG HIN YIU ANTHONY0 citations36

SINGER WOLFGANG

1 patent

US8885141B2Nov 11, 2014

EUV lithography device and method for processing an optical element

SINGER WOLFGANG2 citations59

HEMBACHER STEFAN

1 patent

US9046794B2Jun 2, 2015

Cleaning module, EUV lithography device and method for the cleaning thereof

HEMBACHER STEFAN3 citations57