P

Inventor

SAITO KENJI

JP248 patents
⚠️ This page may combine multiple inventors who share the name “SAITO KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

12 patents
US5553110ASep 3, 1996

X-ray mask structure, process for production thereof, apparatus and method for X-ray exposure with the X-ray mask structure, and semiconductor device produced by the X-ray exposure method

CANON KK63 citations96
US5465148ANov 7, 1995

Apparatus and method for detecting the relative positional deviation between two diffraction gratings

CANON KK59 citations96
US5270794ADec 14, 1993

Fine structure evaluation apparatus and method

CANON KK97 citations96
US4815027AMar 21, 1989

Optical operation apparatus for effecting parallel signal processing by detecting light transmitted through a filter in the form of a matrix

CANON KK56 citations96
US6946666B2Sep 20, 2005

Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same

CANON KK20 citations93
US5477554ADec 19, 1995

Phase shift device and laser apparatus utilizing the same

CANON KK21 citations93
US5440394AAug 8, 1995

Length-measuring device and exposure apparatus

CANON KK25 citations93
US5432603AJul 11, 1995

Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected

CANON KK36 citations93
US5321502AJun 14, 1994

Measuring method and measuring apparatus

CANON KK25 citations93
US4910107AMar 20, 1990

Optical recording-reproducing method and device by using the same

CANON KK28 citations93
US4790664ADec 13, 1988

Device and method for measuring optical properties

CANON KK33 citations93
US6097472AAug 1, 2000

Apparatus and method for exposing a pattern on a ball-like device material

CANON KK28 citations92

FUJI PHOTO FILM CO LTD

8 patents

SUMITOMO RUBBER IND

3 patents

TAIYO YUDEN KK

3 patents

NEC CORP

3 patents

SUMITOMO ELECTRIC INDUSTRIES

3 patents

NEC ELECTRONICS CORP

2 patents

MITSUBISHI MOTORS CORP

2 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

YOROZU JIDOSHA KOGYO KK

1 patent

TOSHIBA SILICONE

1 patent

MURATA MANUFACTURING CO

1 patent

SANDEN CORP

1 patent

KDDI CORP

1 patent

SHOWA CORP

1 patent

KAWASAKI STEEL CO

1 patent

SUZUKI MOTOR CO

1 patent

MISAWA TAKESHI

1 patent

SAITO KENJI

1 patent

FUJITSU LTD

1 patent

NAMCO LTD

1 patent

MURAKAMI TOSHIO

1 patent

Showing the top 50 of 248 patents by PatentIndex Score.