Inventor
KIEREY HOLGER
DE12 patents
⚠️ This page may combine multiple inventors who share the name “KIEREY HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
8 patentsUS11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US10649340B2May 12, 2020
Reflective optical element for EUV lithography
ZEISS CARL SMT GMBH1 citations59
US12111578B2Oct 8, 2024
Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirror
ZEISS CARL SMT GMBH0 citations54
US11231658B2Jan 25, 2022
Arrangement for an EUV lithography apparatus
ZEISS CARL SMT GMBH0 citations49
US10578974B2Mar 3, 2020
Optical element, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations48
US10303067B2May 28, 2019
Cooler for use in a device in a vacuum
ZEISS CARL SMT GMBH0 citations43
US10578972B2Mar 3, 2020
EUV collector for use in an EUV projection exposure apparatus
ZEISS CARL SMT GMBH0 citations39
US10503075B2Dec 10, 2019
EUV Collector
ZEISS CARL SMT GMBH0 citations37
ZEISS CARL LASER OPTICS GMBH
4 patentsUS9541685B2Jan 10, 2017
Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type
ZEISS CARL LASER OPTICS GMBH10 citations80
US8342701B2Jan 1, 2013
Reflective optical element for use in an EUV system
ZEISS CARL LASER OPTICS GMBH14 citations79
US7175773B1Feb 13, 2007
Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating
ZEISS CARL LASER OPTICS GMBH12 citations79
US7629572B2Dec 8, 2009
Optical devices and related systems and methods
ZEISS CARL LASER OPTICS GMBH7 citations71