Inventor
HSU CHIH-HSUN
US17 patents
⚠️ This page may combine multiple inventors who share the name “HSU CHIH-HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS10790180B2Sep 29, 2020
Electrostatic chuck with variable pixelated magnetic field
APPLIED MATERIALS INC5 citations84
USD1052548SNov 26, 2024
Gas diffuser
APPLIED MATERIALS INC5 citations70
US10460968B2Oct 29, 2019
Electrostatic chuck with variable pixelated magnetic field
APPLIED MATERIALS INC1 citations62
US12568804B2Mar 3, 2026
Method of in-situ selective metal removal via gradient oxidation for gapfill
APPLIED MATERIALS INC0 citations60
USD1116010SMar 3, 2026
Gas diffuser assembly
APPLIED MATERIALS INC0 citations58
US12538542B2Jan 27, 2026
Method of forming a MEOL contact structure
APPLIED MATERIALS INC0 citations47
US12374568B2Jul 29, 2025
One chamber multi-station selective metal removal
APPLIED MATERIALS INC0 citations47
SILICONWARE PRECISION INDUSTRIES CO LTD
3 patentsUS11610850B2Mar 21, 2023
Electronic package and fabrication method thereof
SILICONWARE PRECISION INDUSTRIES CO LTD3 citations71
US12107055B2Oct 1, 2024
Electronic package and fabrication method thereof
SILICONWARE PRECISION INDUSTRIES CO LTD0 citations60
US11742296B2Aug 29, 2023
Electronic package and manufacturing method thereof
SILICONWARE PRECISION INDUSTRIES CO LTD0 citations50
LAM RES CORP
3 patentsUS12347650B2Jul 1, 2025
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59
US11967486B2Apr 23, 2024
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59
US9595452B2Mar 14, 2017
Residue free oxide etch
LAM RES CORP0 citations52