Inventor
CHANG TING-HSUN
TW10 patents
Patents
10 patentsUS11772228B2Oct 3, 2023
Chemical mechanical polishing apparatus including a multi-zone platen
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11679469B2Jun 20, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12359090B2Jul 15, 2025
Composition and method for polishing and integrated circuit
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12131944B2Oct 29, 2024
Slurry composition, semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11121028B2Sep 14, 2021
Semiconductor devices formed using multiple planarization processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12172263B2Dec 24, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12002684B2Jun 4, 2024
Methods for chemical mechanical polishing and forming interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11658065B2May 23, 2023
Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11508585B2Nov 22, 2022
Methods for chemical mechanical polishing and forming interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10636701B2Apr 28, 2020
Methods of forming semiconductor devices using multiple planarization processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50