Inventor
NISHIDA TAKAYUKI
8 patents
⚠️ This page may combine multiple inventors who share the name “NISHIDA TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
5 patentsUS11114302B2Sep 7, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations69
US10835932B2Nov 17, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US12417930B2Sep 16, 2025
Substrate treating method and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations57
US11101146B2Aug 24, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US11361979B2Jun 14, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations48