Inventor
DICKEY ERIC R
US30 patents
⚠️ This page may combine multiple inventors who share the name “DICKEY ERIC R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DICKEY ERIC R
11 patentsUS8187679B2May 29, 2012
Radical-enhanced atomic layer deposition system and method
DICKEY ERIC R540 citations98
US8137464B2Mar 20, 2012
Atomic layer deposition system for coating flexible substrates
DICKEY ERIC R13 citations92
US8202366B2Jun 19, 2012
Atomic layer deposition system utilizing multiple precursor zones for coating flexible substrates
DICKEY ERIC R6 citations84
US9469901B2Oct 18, 2016
Atomic layer deposition method utilizing multiple precursor zones for coating flexible substrates
DICKEY ERIC R3 citations73
US8637117B2Jan 28, 2014
Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system
DICKEY ERIC R4 citations73
US9263359B2Feb 16, 2016
Mixed metal-silicon-oxide barriers
DICKEY ERIC R4 citations66
US9238868B2Jan 19, 2016
Atomic layer deposition method for coating flexible substrates
DICKEY ERIC R2 citations62
US9435028B2Sep 6, 2016
Plasma generation for thin film deposition on flexible substrates
DICKEY ERIC R1 citations52
US9133546B1Sep 15, 2015
Electrically- and chemically-active adlayers for plasma electrodes
DICKEY ERIC R0 citations47
US9297076B2Mar 29, 2016
Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition
DICKEY ERIC R0 citations41
US8637123B2Jan 28, 2014
Oxygen radical generation for radical-enhanced thin film deposition
DICKEY ERIC R0 citations41
VIRATEC THIN FILMS INC
8 patentsUS5725746AMar 10, 1998
Shielding for arc suppression in rotating magnetron sputtering systems
VIRATEC THIN FILMS INC76 citations96
US5470452ANov 28, 1995
Shielding for arc suppression in rotating magnetron sputtering systems
VIRATEC THIN FILMS INC64 citations96
US5270858ADec 14, 1993
D.C. reactively sputtered antireflection coatings
VIRATEC THIN FILMS INC69 citations96
US5105310AApr 14, 1992
Dc reactively sputtered antireflection coatings
VIRATEC THIN FILMS INC80 citations96
US5450238ASep 12, 1995
Four-layer antireflection coating for deposition in in-like DC sputtering apparatus
VIRATEC THIN FILMS INC68 citations95
US5372874ADec 13, 1994
DC reactively sputtered optical coatings including niobium oxide
VIRATEC THIN FILMS INC92 citations95
US5106474AApr 21, 1992
Anode structures for magnetron sputtering apparatus
VIRATEC THIN FILMS INC62 citations93
US5022726AJun 11, 1991
Magnesium film reflectors
VIRATEC THIN FILMS INC13 citations69
PLANAR SYSTEMS INC
4 patentsUS5712528AJan 27, 1998
Dual substrate full color TFEL panel with insulator bridge structure
PLANAR SYSTEMS INC101 citations97
US5504389AApr 2, 1996
Black electrode TFEL display
PLANAR SYSTEMS INC83 citations96
US6358632B1Mar 19, 2002
TFEL devices having insulating layers
PLANAR SYSTEMS INC27 citations92
US5581150ADec 3, 1996
TFEL device with injection layer
PLANAR SYSTEMS INC25 citations91