Inventor

WACKERMAN SCOTT C

US5 patents

⚠️ This page may combine multiple inventors who share the name “WACKERMAN SCOTT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

2 patents

US6844027B1Jan 18, 2005

Environment exchange control for material on a wafer surface

ASML HOLDING NV13 citations91

US6780461B2Aug 24, 2004

Environment exchange control for material on a wafer surface

ASML HOLDING NV16 citations83

SILICON VALLEY GROUP

2 patents

US6468586B1Oct 22, 2002

Environment exchange control for material on a wafer surface

SILICON VALLEY GROUP15 citations91

US6254936B1Jul 3, 2001

Environment exchange control for material on a wafer surface

SILICON VALLEY GROUP33 citations91

ASML NETHERLANDS BV

1 patent

US6911091B2Jun 28, 2005

Environment exchange control for material on a wafer surface

ASML NETHERLANDS BV6 citations72